VACUUM PAD OVAL TYPE
Best suitable for substrate or long work like semiconductor.
- Existing pad holder (A,B,C,D type) are downsized and realized space saving. Optional Free holder and Pad Direct mounting Filter can be selected with the holder.
- Pad replacement can be done without removing pad holders from equipments as it was used to be.
- The pad holder required for "No copper alloy" and "Low level ozone resistance" is available. No copper alloy is applied for metal parts and HNBR is used for seal materials.