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VACUUM PAD OVAL TYPE

Vacuum Pad Oval Type

Best suitable for substrate or long work like semiconductor.

- Existing pad holder (A,B,C,D type) are downsized and realized space saving. Optional Free holder and Pad Direct mounting Filter can be selected with the holder.

- Pad replacement can be done without removing pad holders from equipments as it was used to be.

- The pad holder required for "No copper alloy" and "Low level ozone resistance" is available. No copper alloy is applied for metal parts and HNBR is used for seal materials.

Specifications

Models

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