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FLOW SENSOR

Flow Sensor

Mini-type flow sensor to verify suction lift of small workpieces.

  • Built-in needle valve model
  • Panel mount is possible
  • Dual display / 2 color indication feature
  • High accuracy
  • Quick response time
  • Bidirectional flow measurement is possible
  • No straight piping requires

Specifications

Type test: 10
Accumulation Max flow rate: 9999999mL
Accumulation Mini. Unit setting: 1mL
Accumulation pulse output rate: 10mL
Ambient Temperature & Humidity: 0 to 50ºC, max. 90% RH
Analog output A: Current output 4 to 20mA (connected impedance: 0 to 300O
Analog output V: 1 voltage output 1 to 5V (connected load impedance: min. 50kO)
Assured accuracy range: 3~100%F.S.
Built-in Needle Valve N (9*): o:available
Current Consumption: Max. 50mA
Display Method: 4 digits + 4 digits, 2 color LCD
EMC directive: Conformity
Flow Rate Display Minimum unit setting: 1mL/min
Flow Rate Display Range F: 0~1000mL/min
Flow Rate Display Range R: -1000~1000mL/min
Fluid Medium: Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas
Function: Flow rate display, flow rate - peak hold, switch output, analog output, and other
Installing Orientation: Horizontal or Vertical
Lead Wire: ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm
Linearity (display/analog output): Max ± 3%F.S. (Air vent for secondary side, 25ºC)
Max working pressure: 0.7MPA
Min working pressure: -0.09MPa
Port Size ø10mm Quick-fitting: o:available
Port Size ø4mm Quick-fitting: o:available
Port Size ø6mm Quick-fitting: o:available
Port Size ø8mm Quick-fitting: o:available
Power supply voltage A: DC24V (21.6~26.4V)
Power supply voltage V: DC12~24V (10.8~26.4V)
Pressure characteristics: Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference)
Protective Circuit: Power supply and switch output reverse connection protections, and switch output load short-circuit protection
Protective Structure: IEC standard: IP40
Repeatability: Max ± 1%F.S.
Response Time: Max. 50ms
Straight pipe introduction: Not required
Switch output N: 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V)
Switch output P: 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V)
Temperature Characteristics: Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference)
Withstand pressure: 1MPa
Working Fluid Temperature: 0 to 50ºC (no dew condensation)

Type test: 100
Accumulation Max flow rate: 99999.99L
Accumulation Mini. Unit setting: 0.01mL
Accumulation pulse output rate: 0.1mL
Ambient Temperature & Humidity: 0 to 50ºC, max. 90% RH
Analog output A: Current output 4 to 20mA (connected impedance: 0 to 300O
Analog output V: 1 voltage output 1 to 5V (connected load impedance: min. 50kO)
Assured accuracy range: 3~100%F.S.
Built-in Needle Valve N (9*): o:available
Current Consumption: Max. 50mA
Display Method: 4 digits + 4 digits, 2 color LCD
EMC directive: Conformity
Flow Rate Display Minimum unit setting: 0.01mL/min
Flow Rate Display Range F: 0~10.00mL/min
Flow Rate Display Range R: -10.00~10.00mL/min
Fluid Medium: Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas
Function: Flow rate display, flow rate - peak hold, switch output, analog output, and other
Installing Orientation: Horizontal or Vertical
Lead Wire: ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm
Linearity (display/analog output): Max ± 3%F.S. (Air vent for secondary side, 25ºC)
Max working pressure: 0.7MPA
Min working pressure: -0.09MPa
Port Size ø10mm Quick-fitting: o:available
Port Size ø4mm Quick-fitting: o:available
Port Size ø6mm Quick-fitting: o:available
Port Size ø8mm Quick-fitting: o:available
Power supply voltage A: DC24V (21.6~26.4V)
Power supply voltage V: DC12~24V (10.8~26.4V)
Pressure characteristics: Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference)
Protective Circuit: Power supply and switch output reverse connection protections, and switch output load short-circuit protection
Protective Structure: IEC standard: IP40
Repeatability: Max ± 1%F.S.
Response Time: Max. 50ms
Straight pipe introduction: Not required
Switch output N: 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V)
Switch output P: 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V)
Temperature Characteristics: Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference)
Withstand pressure: 1MPa
Working Fluid Temperature: 0 to 50ºC (no dew condensation)

Type test: 101
Accumulation Max flow rate: 999999.9L
Accumulation Mini. Unit setting: 0.1mL
Accumulation pulse output rate: 1L
Ambient Temperature & Humidity: 0 to 50ºC, max. 90% RH
Analog output A: Current output 4 to 20mA (connected impedance: 0 to 300O
Analog output V: 1 voltage output 1 to 5V (connected load impedance: min. 50kO)
Assured accuracy range: 3~100%F.S.
Built-in Needle Valve N (9*): o:available
Current Consumption: Max. 50mA
Display Method: 4 digits + 4 digits, 2 color LCD
EMC directive: Conformity
Flow Rate Display Minimum unit setting: 0.1mL/min
Flow Rate Display Range F: 0~100.00mL/min
Flow Rate Display Range R: -10.00~10.00mL/min
Fluid Medium: Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas
Function: Flow rate display, flow rate - peak hold, switch output, analog output, and other
Installing Orientation: Horizontal or Vertical
Lead Wire: ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm
Linearity (display/analog output): Max ± 3%F.S. (Air vent for secondary side, 25ºC)
Max working pressure: 0.7MPA
Min working pressure: -0.09MPa
Port Size ø4mm Quick-fitting: o:available
Port Size ø6mm Quick-fitting: o:available
Port Size ø8mm Quick-fitting: o:available
Power supply voltage A: DC24V (21.6~26.4V)
Power supply voltage V: DC12~24V (10.8~26.4V)
Pressure characteristics: Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference)
Protective Circuit: Power supply and switch output reverse connection protections, and switch output load short-circuit protection
Protective Structure: IEC standard: IP40
Repeatability: Max ± 1%F.S.
Response Time: Max. 50ms
Straight pipe introduction: Not required
Switch output N: 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V)
Switch output P: 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V)
Temperature Characteristics: Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference)
Withstand pressure: 1MPa
Working Fluid Temperature: 0 to 50ºC (no dew condensation)

Type test: 20
Accumulation Max flow rate: 99999.99L
Accumulation Mini. Unit setting: 0.01mL
Accumulation pulse output rate: 0.02mL
Ambient Temperature & Humidity: 0 to 50ºC, max. 90% RH
Analog output A: Current output 4 to 20mA (connected impedance: 0 to 300O
Analog output V: 1 voltage output 1 to 5V (connected load impedance: min. 50kO)
Assured accuracy range: 3~100%F.S.
Built-in Needle Valve N (9*): o:available
Current Consumption: Max. 50mA
Display Method: 4 digits + 4 digits, 2 color LCD
EMC directive: Conformity
Flow Rate Display Minimum unit setting: 0.01mL/min
Flow Rate Display Range F: 0~2.00mL/min
Flow Rate Display Range R: -2.00~2.00mL/min
Fluid Medium: Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas
Function: Flow rate display, flow rate - peak hold, switch output, analog output, and other
Installing Orientation: Horizontal or Vertical
Lead Wire: ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm
Linearity (display/analog output): Max ± 3%F.S. (Air vent for secondary side, 25ºC)
Max working pressure: 0.7MPA
Min working pressure: -0.09MPa
Port Size ø4mm Quick-fitting: o:available
Port Size ø6mm Quick-fitting: o:available
Power supply voltage A: DC24V (21.6~26.4V)
Power supply voltage V: DC12~24V (10.8~26.4V)
Pressure characteristics: Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference)
Protective Circuit: Power supply and switch output reverse connection protections, and switch output load short-circuit protection
Protective Structure: IEC standard: IP40
Repeatability: Max ± 1%F.S.
Response Time: Max. 50ms
Straight pipe introduction: Not required
Switch output N: 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V)
Switch output P: 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V)
Temperature Characteristics: Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference)
Withstand pressure: 1MPa
Working Fluid Temperature: 0 to 50ºC (no dew condensation)

Type test: 200
Accumulation Max flow rate: 999999.9L
Accumulation Mini. Unit setting: 0.1mL
Accumulation pulse output rate: 0.2mL
Ambient Temperature & Humidity: 0 to 50ºC, max. 90% RH
Analog output A: Current output 4 to 20mA (connected impedance: 0 to 300O
Analog output V: 1 voltage output 1 to 5V (connected load impedance: min. 50kO)
Assured accuracy range: 3~100%F.S.
Built-in Needle Valve N (9*): o:available
Current Consumption: Max. 50mA
Display Method: 4 digits + 4 digits, 2 color LCD
EMC directive: Conformity
Flow Rate Display Minimum unit setting: 0.1mL/min
Flow Rate Display Range F: -20.00~20.00mL/min
Flow Rate Display Range R: -2.00~2.00mL/min
Fluid Medium: Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas
Function: Flow rate display, flow rate - peak hold, switch output, analog output, and other
Installing Orientation: Horizontal or Vertical
Lead Wire: ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm
Linearity (display/analog output): Max ± 3%F.S. (Air vent for secondary side, 25ºC)
Max working pressure: 0.7MPA
Min working pressure: -0.09MPa
Port Size ø4mm Quick-fitting: o:available
Port Size ø6mm Quick-fitting: o:available
Power supply voltage A: DC24V (21.6~26.4V)
Power supply voltage V: DC12~24V (10.8~26.4V)
Pressure characteristics: Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference)
Protective Circuit: Power supply and switch output reverse connection protections, and switch output load short-circuit protection
Protective Structure: IEC standard: IP40
Repeatability: Max ± 1%F.S.
Response Time: Max. 50ms
Straight pipe introduction: Not required
Switch output N: 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V)
Switch output P: 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V)
Temperature Characteristics: Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference)
Withstand pressure: 1MPa
Working Fluid Temperature: 0 to 50ºC (no dew condensation)

Type test: 201
Accumulation Max flow rate: 9999999L
Accumulation Mini. Unit setting: 1mL
Accumulation pulse output rate: 2L
Ambient Temperature & Humidity: 0 to 50ºC, max. 90% RH
Analog output A: Current output 4 to 20mA (connected impedance: 0 to 300O
Analog output V: 1 voltage output 1 to 5V (connected load impedance: min. 50kO)
Assured accuracy range: 3~100%F.S.
Built-in Needle Valve N (9*): o:available
Current Consumption: Max. 50mA
Display Method: 4 digits + 4 digits, 2 color LCD
EMC directive: Conformity
Flow Rate Display Minimum unit setting: 1mL/min
Flow Rate Display Range F: 0~200.00mL/min
Flow Rate Display Range R: -200.00~200.00mL/min
Fluid Medium: Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas
Function: Flow rate display, flow rate - peak hold, switch output, analog output, and other
Installing Orientation: Horizontal or Vertical
Lead Wire: ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm
Linearity (display/analog output): Max ± 3%F.S. (Air vent for secondary side, 25ºC)
Max working pressure: 0.7MPA
Min working pressure: -0.09MPa
Port Size ø4mm Quick-fitting: o:available
Port Size ø6mm Quick-fitting: o:available
Power supply voltage A: DC24V (21.6~26.4V)
Power supply voltage V: DC12~24V (10.8~26.4V)
Pressure characteristics: Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference)
Protective Circuit: Power supply and switch output reverse connection protections, and switch output load short-circuit protection
Protective Structure: IEC standard: IP40
Repeatability: Max ± 1%F.S.
Response Time: Max. 50ms
Straight pipe introduction: Not required
Switch output N: 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V)
Switch output P: 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V)
Temperature Characteristics: Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference)
Withstand pressure: 1MPa
Working Fluid Temperature: 0 to 50ºC (no dew condensation)

Type test: 5
Accumulation Max flow rate: 9999999mL
Accumulation Mini. Unit setting: 1mL
Accumulation pulse output rate: 5mL
Ambient Temperature & Humidity: 0 to 50ºC, max. 90% RH
Analog output A: Current output 4 to 20mA (connected impedance: 0 to 300O
Analog output V: 1 voltage output 1 to 5V (connected load impedance: min. 50kO)
Assured accuracy range: 3~100%F.S.
Built-in Needle Valve N (9*): o:available
Current Consumption: Max. 50mA
Display Method: 4 digits + 4 digits, 2 color LCD
EMC directive: Conformity
Flow Rate Display Minimum unit setting: 1mL/min
Flow Rate Display Range F: 0~500mL/min
Flow Rate Display Range R: -500~500mL/min
Fluid Medium: Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas
Function: Flow rate display, flow rate - peak hold, switch output, analog output, and other
Installing Orientation: Horizontal or Vertical
Lead Wire: ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm
Linearity (display/analog output): Max ± 3%F.S. (Air vent for secondary side, 25ºC)
Max working pressure: 0.7MPA
Min working pressure: -0.09MPa
Port Size ø4mm Quick-fitting: o:available
Port Size ø6mm Quick-fitting: o:available
Power supply voltage A: DC24V (21.6~26.4V)
Power supply voltage V: DC12~24V (10.8~26.4V)
Pressure characteristics: Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference)
Protective Circuit: Power supply and switch output reverse connection protections, and switch output load short-circuit protection
Protective Structure: IEC standard: IP40
Repeatability: Max ± 1%F.S.
Response Time: Max. 50ms
Straight pipe introduction: Not required
Switch output N: 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V)
Switch output P: 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V)
Temperature Characteristics: Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference)
Withstand pressure: 1MPa
Working Fluid Temperature: 0 to 50ºC (no dew condensation)

Type test: 50
Accumulation Max flow rate: 99999.99L
Accumulation Mini. Unit setting: 0.01mL
Accumulation pulse output rate: 0.05mL
Ambient Temperature & Humidity: 0 to 50ºC, max. 90% RH
Analog output A: Current output 4 to 20mA (connected impedance: 0 to 300O
Analog output V: 1 voltage output 1 to 5V (connected load impedance: min. 50kO)
Assured accuracy range: 3~100%F.S.
Built-in Needle Valve N (9*): o:available
Current Consumption: Max. 50mA
Display Method: 4 digits + 4 digits, 2 color LCD
EMC directive: Conformity
Flow Rate Display Minimum unit setting: 0.01mL/min
Flow Rate Display Range F: 0~5.00mL/min
Flow Rate Display Range R: -5.00~5.00mL/min
Fluid Medium: Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas
Function: Flow rate display, flow rate - peak hold, switch output, analog output, and other
Installing Orientation: Horizontal or Vertical
Lead Wire: ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm
Linearity (display/analog output): Max ± 3%F.S. (Air vent for secondary side, 25ºC)
Max working pressure: 0.7MPA
Min working pressure: -0.09MPa
Port Size ø4mm Quick-fitting: o:available
Port Size ø6mm Quick-fitting: o:available
Power supply voltage A: DC24V (21.6~26.4V)
Power supply voltage V: DC12~24V (10.8~26.4V)
Pressure characteristics: Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference)
Protective Circuit: Power supply and switch output reverse connection protections, and switch output load short-circuit protection
Protective Structure: IEC standard: IP40
Repeatability: Max ± 1%F.S.
Response Time: Max. 50ms
Straight pipe introduction: Not required
Switch output N: 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V)
Switch output P: 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V)
Temperature Characteristics: Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference)
Withstand pressure: 1MPa
Working Fluid Temperature: 0 to 50ºC (no dew condensation)

Type test: 500
Accumulation Max flow rate: 999999.9L
Accumulation Mini. Unit setting: 0.1mL
Accumulation pulse output rate: 0.5mL
Ambient Temperature & Humidity: 0 to 50ºC, max. 90% RH
Analog output A: Current output 4 to 20mA (connected impedance: 0 to 300O
Analog output V: 1 voltage output 1 to 5V (connected load impedance: min. 50kO)
Assured accuracy range: 3~100%F.S.
Built-in Needle Valve N (9*): o:available
Current Consumption: Max. 50mA
Display Method: 4 digits + 4 digits, 2 color LCD
EMC directive: Conformity
Flow Rate Display Minimum unit setting: 0.1mL/min
Flow Rate Display Range F: 0~50.00mL/min
Flow Rate Display Range R: -50.00~50.00mL/min
Fluid Medium: Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas
Function: Flow rate display, flow rate - peak hold, switch output, analog output, and other
Installing Orientation: Horizontal or Vertical
Lead Wire: ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm
Linearity (display/analog output): Max ± 3%F.S. (Air vent for secondary side, 25ºC)
Max working pressure: 0.7MPA
Min working pressure: -0.09MPa
Port Size ø4mm Quick-fitting: o:available
Port Size ø6mm Quick-fitting: o:available
Power supply voltage A: DC24V (21.6~26.4V)
Power supply voltage V: DC12~24V (10.8~26.4V)
Pressure characteristics: Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference)
Protective Circuit: Power supply and switch output reverse connection protections, and switch output load short-circuit protection
Protective Structure: IEC standard: IP40
Repeatability: Max ± 1%F.S.
Response Time: Max. 50ms
Straight pipe introduction: Not required
Switch output N: 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V)
Switch output P: 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V)
Temperature Characteristics: Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference)
Withstand pressure: 1MPa
Working Fluid Temperature: 0 to 50ºC (no dew condensation)

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